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PIglideA-121 High Precision Model for Semiconductor Testing

PIglideA-121 High Precision Model for Semiconductor Testing

Non-contact, wear-free, and long-lasting, achieving smooth operation at the nanometer level.

In the semiconductor manufacturing industry, high-precision positioning is a crucial factor that affects product quality and yield. Particularly in microfabrication and inspection processes, accurate positioning at the nanometer level is required. Conventional stages that involve friction have faced challenges with precision degradation due to wear and backlash. The PIglide A-121 combines magnetic direct drive and air bearing technology to address these issues. 【Application Scenarios】 - Semiconductor inspection equipment - Precision measurement devices - Microfabrication 【Benefits of Implementation】 - Improved quality through high-precision positioning - Extended lifespan due to non-contact structure - Reduced maintenance costs

  • Other machine elements
  • Cartesian Robot
  • encoder
  • stage

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Air Bearing Rotary Stage A-62x for Semiconductor Manufacturing

Air Bearing Rotary Stage A-62x for Semiconductor Manufacturing

Innovating the semiconductor manufacturing process with nanometer-level precision.

In the semiconductor manufacturing industry, high-precision positioning is a crucial factor that affects yield and product quality. Particularly in wafer inspection and exposure processes, accurate positioning at the nanometer level is required. Conventional rotary stages can cause minor vibrations and eccentricities due to friction, which may lead to a decline in quality. The PIglide A-62x series addresses these challenges with its frictionless air bearing technology. 【Application Scenarios】 - Wafer inspection - Exposure equipment - Precision measurement 【Benefits of Implementation】 - Improved yield through high-precision positioning - Stabilization of product quality - Increased productivity

  • Other machine elements
  • Other industrial robots
  • encoder
  • stage

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A-62x Air Bearing Rotary Stage for Optical Adjustment

A-62x Air Bearing Rotary Stage for Optical Adjustment

Supports optical system adjustments with nanometer-level precision.

In the optical industry, precise positioning of optical elements such as lenses and mirrors is a crucial factor that affects system performance. Particularly in high-precision optical inspection and alignment, even slight deviations in angle or position can significantly impact measurement results. The air-bearing rotary stage PIglideA-62x high-precision model achieves minimal wobble and eccentricity through frictionless, non-contact rotation, realizing flatness and eccentricity of less than 200nm. This enables precise positioning of optical elements and supports high-precision optical inspection and alignment. 【Usage Scenarios】 - Angle adjustment of optical lenses and mirrors - Precise alignment of optical elements - Construction of optical inspection systems 【Benefits of Implementation】 - Enables precise positioning at the nanometer level - Achieves high-precision optical measurements - Contributes to improved system performance

  • Other machine elements
  • Other industrial robots
  • encoder
  • stage

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